Centre for Sensors, Instruments and Systems Development
Universitat Politècnica de Catalunya
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Spectroscopic Ellipsometer
Name
Spectroscopic EllipsometerBrand
MICROPACKModel
SpecEL-2000Description
Characterization of semi-transparent thin films from 1 nm to 5 mm thick. The system evaluates both the thickness and the optical properties of the material (refractive index and extinction). The wavelength range is between 380 and 780 nm or between 450 and 900 nm. The accuracy is 0.1 nm in layer width and 0.005% in refractive index. The maximum sample dimensions are 200 x 4 mm, or (200 x 400) mm
Extranet
CD6 Centre for Sensors, Instruments and Systems Development
Rambla de Sant Nebridi, 10 · 08222 · Terrassa (Barcelona)
Rambla de Sant Nebridi, 10 · 08222 · Terrassa (Barcelona)